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| SMEE’s SSB500/10A Scanner, designed for the Front-end semiconductor manufacturing process, for 200mm wafer production at 100nm resolution, delivers high performance, high reliability and low CoO (Cost of Ownership). It has main features of 193nm ArF excimer light source, Projection Lens with large NA and off-axis illuminator to achieve high resolution and process stability. Variable NA and multi-illumination modes vary resolution and DOF; Overlay and focus requirements are in line with the resolution node. High productivity is assured by large FOV, superior alignment and synchronized scanning speed. |
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