| Levels |
Titles |
Contents |
| Elementary |
Optical Lithography Overview |
| Applications of Lithography |
|
| Basic Functions of Lithography |
|
| Introduction of Lithography Terms and Definitions |
|
| Optical Lithography Operational Safety Tips |
| Importance of Lithography Operational Safety |
|
| Interpretation of the Signs, Warnings, Hazards and Alarm |
|
| Safety Operation and Precautions |
|
| Power Supply Demand |
| Workshop and Environmental Demand under Normal Operation |
|
| Water, Electricity, Gas and Vacuum Demand under Normal Operation |
|
| Optical Lithography System Introduction |
| Control System Structure |
|
| Lithography Control Panel and Components |
|
| PCB Function and Operation of Control Cabinet |
|
| Hardware Configurations, Layouts and Principles |
|
| Optical Lithography Software Operation |
| Lithography Software Structure and Configuration |
|
| Guidance on Lithography Software Installation |
|
| Introduction on Lithography Software Interface and Menu |
|
| Compile of Batch Processing Documents |
|
| Introduction of Operation Flow and Batch Processing |
|
| Advanced |
Common Failures and Debugging |
| Common Failures and Its Relative Causes |
|
| Common Failures Debugging |
|
| Maintenance and Calibration of Optical Lithography |
| Regular Maintenance and Operational Flow |
|
| est and Calibration of Lithography |
|
| Auxiliary Test Equipment and Operation Method |
|
