2002

• 2002.03
  Shanghai Micro Electronics Equipment Co., Ltd. was founded in Zhangjiang Hi-tech Park.
• 2006.04
  Registered trademark of lithography equipment products was approved by State Administration for Industry and Commerce.
• 2008.11
  Lithography tool as National Science and Technology Major Project under China 10th Five-Year Plan was accepted by Ministry of Science and Technology.
• 2008.12
  Identified as High and New Technology Enterprises in Shanghai.
• 2009.12
  Shipped China’s first advanced packaging stepper (SSB500/10A) to the customer.
• 2010.08
  Identified as Innovative Enterprises in Shanghai.
• 2011.10
  SSB500 series advanced packaging stepper was approved as National Key and New Product Planning Projects by Ministry of Science and Technology.

2012

• 2012.05
  SSB500 series stepper achieved initial overseas sales.
• 2012.06
  SSB500 series advanced packaging stepper was awarded New Patented Products in Shanghai.
• 2012.11
  SSB500 Stepper was awarded GOLDEN PRIZE by the 14th Session China International Industry Fair.
• 2012.12
  Research project-Key Technology of Nano Precision Multi-freedom Motion System and Its Application won the second Prize of National Technology Invention Award of 2012.
• 2013.08
  China’s first projection lithography tool SSB225/10 for G2.5 AM-OLED TFT process was shipped to the customer, and identified as National Key and New Product in 2014.
• 2013.11
  Named as the first batch of National Exemplary Enterprises of Intellectual Property Rights.
• 2014.03
  Advanced packaging stepper team was selected as the Innovative Team in Key Fields for Innovative Talents Promotion Program of Ministry of Science and Technology.
• 2014.10
  SMEE’s innovative and research team was awarded National Advanced Group of Professional and Technical Talents.
• 2016.01
  SMEE Technology Center was identified as a National Enterprise Technology Center.
• 2016.06
  Shipped China’s first IC front-end I-line scanner to the customer.
• 2016.11
  G4.5 High Resolution Projection Lithography Tool for flat panel display was awarded GOLD AWARD by the 18th Session China International Industry Fair.
• 2017.01
  Accomplished the joint-stock reform and was renamed officially as Shanghai Micro Electronics Equipment (Group) Co., Ltd.
• 2017.03
  Key Technologies Development and Application of FPD High-precision Patterned Process and Equipment was awarded First Prize of Shanghai Science and Technology Progress.
• 2017.04
  Key Technologies Pre-research Project for Immersion Lithography Tool was officially accepted.
• 2017.10
  90nm Step-and-Scan Lithography Demo passed onsite test by experts.
• 2017.11
  SPA 200 Series Photo Alignment Equipment was awarded SILVER AWARD by the 19th Session China International Industry Fair.
• 2017.12
  Shipped China’s first G6 high resolution TFT lithography tool.
• 2018.03
  Project of 90nm Lithography Tool was officially accepted.
• 2018.06
  SSB500 Stepper was certified as Shanghai Brand among the first batch of enterprises.
• 2018.09
  600 Series IC Front-end Scanner was awarded SILVER AWARD by the 20th Session China International Industry Fair.
• 2019.12
  SMEE was granted AEO Certificate by General Administration of Customs, P.R. China. SSB300 Stepper was selected as Single Champion Product in the Manufacturing Industry.
• 2020.01
  SMEE won the third Pudong New Area Director Quality Award.

NOW